Chapter 340 Happy Supporting Unit
The Northeast Institute of Optics received a request to develop an optical path system. The initiator of the request came from the 12th Ministry of Machine Building, but did not specify what it was used for.

The requirements are very considerately divided into two levels, and the implementation process is also divided into two steps.

The first step is to diffuse the 355nm wavelength laser beam into a parallel beam with a diameter of 160mm.

The second step is to use this diffused parallel light beam to re-microproject the image on the glass plate in the light path into a 20mm spot. After microprojection, the image deformation is required to be no more than 5 microns, the smaller the better.

This requirement is neither simple nor troublesome. It is just at the level that can be achieved with a little effort.

For people who are engaged in technology, this requirement is the most comfortable. It is neither without challenge and sense of accomplishment, nor too demanding to be difficult to achieve.

Moreover, the other party clearly stated that it should be implemented in two steps. The first step should be submitted first after it is completed. The first step should be completed as quickly as possible, and the second step can be done slowly, but the quality must be stable.

You can also submit the results in steps, which is more comfortable.

The other party was even very considerate and sent us a laser, which was a 355nm laser light source.

This is not a ruby ​​laser. It was originally a YAG (yttrium aluminum garnet) laser prepared by Gao Zhendong for laser ranging. The power of this thing is relatively easy to increase, and the wavelength can be adjusted according to the doping.

This is exactly part of Gao Zhendong and Factory 1274's integrated circuit process research. You can tell at a glance that this thing is the optical path system used in the lithography machine.

It was Gao Zhendong's idea to divide the entire optical path system into two steps.

The first step is relatively simple and can be used for contact or proximity lithography machines. Both of them are direct projection machines, and the actual resolution is approximately the same as the resolution of the template.

The second step is more difficult, so we just need to wait for the Northeast Institute of Optics to slowly develop it. This is intended to be used for projection lithography machines, and it will not be a problem to develop it in one, two, or three years. If it cannot be developed, the proximity lithography machine will be enough. If it is developed, it will be pure profit.

At the same time, comrades working on organic materials at a certain chemical research institute also received research requirements from the 355th Ministry of Machine Building on photosensitive materials. The research requirements clearly stated that the photosensitive material could be one of the photopolymerization type, photodecomposition type, and photocross-linking type, and could be used for laser photosensitivity imaging, with a working light wavelength of nm.

The 12th Ministry of Machine Building also sent a laser and simple laser diffusion accessories to be used as light sources during the experiment.

To be honest, it is the first time for colleagues in the institute to see such clear requirements in a document that even clearly states the technical route.

Even for the photo-cross-linking type, they had to read the explanation in the requirement document before they could figure out what it was.

It would be great if all demanders were like this one, the comrades at the Institute of Chemistry thought happily, they can also learn a lot!

Actually, Gao Zhendong had no choice. He didn't know which one could be made now. Anyway, this thing existed in 65, so he simply wrote down the routes of several common photoresists. Whichever one you make will work. It's just the difference between positive and negative resists. All can be used.

When a technology first emerges, it has the greatest degree of freedom and there is no need to consider too many details. Moreover, the supporting technology does not need to consider the performance differences caused by differences in technical routes, because the requirements are not that high. It is probably enough to be usable, and it is considered a skill to be able to develop it.

In this era, there is no need to consider a lot of advanced technologies such as future photolithography technology. They cannot be used at all, and there are no conditions to use them.

If you are already good at 10-100 micron lithography and then want to add immersion lithography, multiple exposure, EUV light source, etc., it is undoubtedly a waste of time.

Not to mention these wonderful supporting factories, Gao Zhendong himself is currently studying the worktable with a bunch of level 8 workers in the factory. Although multiple exposures are not involved, overlay engraving is still required and the positioning accuracy of the worktable still needs to be considered.

Overlay engraving is to engrave multiple graphics onto the same workpiece in multiple times to form a complete graphic.

If it is only engraved once, there is no need to worry about the overlay accuracy, as long as the light projection range is on the wafer and the light projection accuracy is guaranteed. However, in the integrated circuit process, many photolithography steps are required to form different structures, and these structures are connected by circuits, so the overlay accuracy must still be guaranteed.

As for the double workbench, just put it aside for now. One of the workbench is not set up properly yet. Thinking too much about it will only cause trouble for yourself.

"Mr. Gao, do you want the positioning accuracy of this thing to be half a millimeter?" A group of old eighth-level workers gritted their teeth.

1 wire, from a machining perspective, is equal to 10 microns, and half a wire is 5 microns.

Gao Zhendong nodded: "Well, let's not consider the mobile positioning accuracy first, just consider the relative positioning accuracy when the two workpieces are fixed."

If micro-projection is not yet understood, then the accuracy of mobile positioning is of little significance, because there is no need to engrave chips one by one on the wafer, but to project the image of the entire wafer at one time. In this case, even if overlay is used, the main consideration is the relative position accuracy of the template and wafer when they are fixed. This is why contact or proximity lithography machines were used at the beginning. The technology is much simpler.

Several old masters, including Yi Zhonghai, put their minds at ease, and this became much easier to handle.

Gao Zhendong sent them the requirements for the entire mechanical part of the lithography machine and explained to them one by one that the lithography machine is more than just the above things, such as the coating of photoresist, the generation of a dust-free environment, etc.
In fact, the early lithography machines looked like a fume hood in a chemical laboratory, and they were also equipped with a microscope for manual adjustment and observation. They also looked like a biological device. Anyway, they did not look like an industrial machine, and were not as advanced as they later looked.

After listening to Gao Zhendong's request, all the old masters felt that it was possible and not a big problem, so they went to work after receiving the assignment. Some of these old masters were from the Third Factory, and some were temporarily borrowed from other workshops to help. No matter where they came from, they had to work in the research site of the Third Factory during this period.

As for other processes, they have all been handed over to Factory 1274. The conditions there are mature and it is a professional semiconductor factory after all.

At the same time, the security director was talking to Liu Haizhong. Although Liu Haizhong was also an experienced blacksmith, he was still far from level eight and was not qualified to be involved in the special projects of the third factory. As for production, he was not from the third factory, so he had no say.

The director of security wanted to talk to him because he had good news for him, at least that was what he thought.

"Master Liu, you are an old comrade in the factory. Judging from your consistent performance, you are very concerned and active in our security and safety work."

Director Zhang of the Security Department came up and started praising Liu Haizhong a lot. Liu Haizhong felt extremely comfortable and his mind couldn't help but become more active.

Old Liu, is this a turning point for me? Has my boss finally seen my efforts? Is he willing to give me a chance and give me more responsibilities?

Just when he was daydreaming and having sweet dreams, he really heard the sound of nature.

".The factory has seen and remembered your performance, so now there is a burden, I want to see if you are willing to take it up?"

After a round of praise, Director Zhang finally told him the reason why he called him over this time, which made Liu Haizhong very anxious.

A burden? A load?
Speaking of this, Liu Haizhong is no longer sleepy. It's like a thunder exploding in his head. I said, my efforts and attitude will not be ignored by the leaders anyway.

As for his culture, he doesn't come up with words like "a pearl covered in dust" or "unappreciated talent". In short, his thoughts are quite simple.

You have a burden, right? Before I even heard what it was, Liu Haizhong nodded hurriedly: "I am willing, I am willing, please let the organization and the masses test me."

He had heard a lot of such words on the radio and just said them out loud.

Director Zhang frowned and said, "Master Liu, don't worry, don't worry. You are not a member of the organization yet, so you don't need to be tested by the organization."

I've heard that this guy with the bangs is a bit too eager to improve himself, and now it seems that he is indeed a bit abnormal.

"Oh, oh, oh. Then please give me more burdens in the factory. I will never frown." The heavier the burden, the higher the position.

Not really, not really, Director Zhang thought to himself, and said, "It's like this, the production tasks and products of our factory are becoming more and more important. In order to ensure the safety of production work, the factory has decided to increase the strength of security patrols. As a result, the strength of our security department and militia is not enough. The factory hopes to select a group of old comrades, a combination of old and new, to supplement the patrol force. But let me make it clear first, there will be no extra salary for this matter, just retain your original salary."

Is this going to join the Security Department? Liu Haixin was full of anticipation. What's the salary? Do I need a salary? After all, I am a senior technician, so I don't need this.

The scope of authority and responsibility of the Security Department these days is extremely broad, especially in a large factory like the Third Rolling Mill, which is very powerful.

"Based on your usual performance, Master Liu, you are the priority this time. The Security Department hopes that you can serve as the patrol team leader and lead two young comrades to contribute to the factory's security work in your spare time. What do you think, Master Liu? Of course, this is entirely voluntary and will not be forced. This kind of patrol team will be established in batches, and it will not affect the work if you are unwilling."

When Liu Haizhong heard this, he was in a dilemma.

You should do it. It turns out this is a part-time job. You still have to do your regular job.

If he said he didn't want to do it, he would be a team leader, leading two people. Maybe this was the first step in his career as an official. If he missed this opportunity, he might never get it again.

Just as Liu Hai was wavering, Director Zhang added the last straw that broke the camel's back in his heart.

(End of this chapter)